Front-end design of high precision displacement sensor based on linear array CCD

In order to achieve the high-precision non-contact measurement for tiny displacement, a high-precision displacement sensor front-end module is designed based on linear array CCD. An optical lens is designed using the principle of laser triangulation, and the system uses the FPGA to generate the drive timing required for the linear array CCD. The one-dimensional video signal output by CCD is handled to obtain a stable analog signal through the front circuit, and the signal is available for digital circuitry. The system has the characteristics of simple structure, small volume, stable output signal, high resolution and high precision. Experimental tests show that the sensor front-end module outputs are stable with small interference analog signal after calculation, the maximum range is ±15 mm, and the accuracy can reach 20 μm. The system can be widely used in the precise measurement of tiny displacement.