<title>Investigation of processes of manufacturing hologram diffraction gratings based on As-S-Se layers</title>

Results of investigation of processes providing formation of hologram diffraction gratings based on As₂S₃ layers are represented. Using the method of atomic force microscopy the groove profile shape is studied for these gratings in dependency on exposure values. Carried out are measurements of their diffraction efficiency dependencies and analyzed is their relation to the relief shape of the grating surface.