Effect of Plasma Treatments and Plasma‐Polymerized Films on the Adhesion of Parylene‐C to Substrates

This work deals with the most severe limitations of Parylene‐C coatings, namely their poor adhesion to the substrate and barrier properties. To address these limitations, the surface properties of the substrate are modified prior to the Parylene deposition step by depositing a nano‐film interfacial layer by means of a plasma polymerization process. The multilayer coating was realized using a newly designed, innovative multi‐chamber system. Tests of dry adhesion (at 90° and 180°) and electrochemical impedance spectroscopic (EIS) measurements were performed to evaluate the effect of the plasma pre‐processing. Adhesion strength of 3 and 6.8 N cm −1 were recorded for the 90° and 180° tape tests, respectively, while an impedance level of 10 7 Ω cm −2 at 100 Hz was registered by EIS measurement.