掠入射小角散射
散射
薄膜
光学
材料科学
小角X射线散射
基质(水族馆)
同步加速器
梁(结构)
小角度散射
入射(几何)
纳米技术
物理
非弹性散射
海洋学
地质学
X射线拉曼散射
作者
Joanne R. Levine,J. B. Cohen,Yip‐Wah Chung,P. Georgopoulos
标识
DOI:10.1107/s002188988900717x
摘要
Grazing-incidence small-angle X-ray scattering (GISAXS) is introduced as a method of studying discontinuous thin films. In this method, the incident beam is totally externally reflected from the substrate followed by small-angle scattering of the refracted beam by the thin film. The experiment described establishes the ability of GISAXS to provide size information for islands formed in the initial stages of thin film growth. The data presented are for gold films of 7 and 15 Å average thicknesses on Corning 7059 glass substrates. The advantages of this technique are that it is non-destructive, can be done in situ , provides excellent sampling statistics, does not necessarily require a synchrotron source, and is not limited to thin or conducting substrates.
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