New Ways of Revealing the Microstructures of SiC Materials

Abstract In order to understand the relationships which exist between the microstructures and mechanical properties of ceramic materials and to clarify their respective mechanisms of corrosion, a detailed picture of their microstructures is of particular importance. The examination of such structures using field emission scanning electron microscopy in combination with EDX analysis as well as the FIB technique are demonstrated on polished and electrochemically corroded LPS (liquid phase sintered SiC) and SSiC materials. The possibilities for revealing the diffusion zones in semi-conducting SiC grains are presented. These methods also help to explain the core-shell structures caused by electrochemical corrosion.