A new formation process of the KrF excimer by irradiating the Kr/F 2 gas mix with KrF laser beam is reported. The formation process is assigned as a laser-induced harpooning reaction through two-photon pumping. This process has made it possible to prepare KrF excimers in highly excited vibrational states under simple and control lable conditions, and has enabled the quantitative investigation of the vibrational relaxation processes of the KrF excimer.