Handbook of Static Secondary Ion Mass Spectrometry

Part 1 Static secondary ion mass spectrometry for surface chemical characterization: the SIMS phenomenon the experimental parameters the SIMS experiment experimental procedures used in acquisition of spectra. Part 2 Library of spectra. Part 3 Case studies: static SIMS in surface science cleaning of semiconductor materials SIMS imaging of the mechanism of oxide growth the use of MS/MS techniques in materials analysis SIMS imaging of semiconductor devices. (Part contents).