Demonstration of a Thin-Film Lithium Niobate Modulator With Integrated Bias Controllers

To enhance the portability and stability of the thin-film lithium niobate modulator (TFLNM) under different working conditions, an integrated bias controller is proposed and demonstrated based on multi-physics simulation modeling algorithms and heterogeneous integration strategies. A new transmission formula with higher accuracy is enabled according to the integrated device. Theoretical analysis results show the fabricated devices have a bandwidth over 110 GHz. Experimental results show the device can operate stably for 3500 hours online at 110 GHz, with mere 0.01°C phase point drift. Notably, the Transmitter and Dispersion Eye Closure for PAM4 (TDECQ) achieves 1.91 dB. To our knowledge, this is currently the best-performance electro-optic hybrid integrated TFLNM, which is suitable for large-scale network calculation.