计算
材料科学
光学
离子束
梁(结构)
半最大全宽
离子
光电子学
化学
物理
有机化学
作者
Hsing-Yu Wu,Li-Siang Shen,Shaorong Huang,Wen‐Wei Lin,Li‐Jen Hsiao,Ching-Ling Cheng,Guoyu Yu,Yung-Shin Sun,Jin–Cherng Hsu
出处
期刊:Applied Optics
[Optica Publishing Group]
日期:2024-08-08
卷期号:63 (25): 6567-6567
被引量:3
摘要
In this study, an ion source figured out the surface of a glass-ceramic material with an ultra-low thermal expansion coefficient for space optical elements. The investigation of the single-point, line, and square figuring patterns assessed the detailed characteristics of the ion beam. At a fixed ion beam current and processing time, a beam voltage of 600 V led to the greatest removal depth with the narrowest full width at half-maximum (FWHM). The surface roughness under different beam voltages was also examined and discussed. Line figuring with an ion beam voltage of 600 V and a one-dimensional sample moving speed of 0.25 mm/s exhibited a maximum depth removal rate of 19.71 nm/min after being polished 15 times. Two-dimensional square figuring was performed to polish a plane mirror with a diameter of 60 mm, and it successfully reduced its surface’s peak-to-valley value to 18 nm due to the melting heat phenomenon of the glass-ceramic material in ion beam figuring (IBF).
科研通智能强力驱动
Strongly Powered by AbleSci AI