3D Integrated Photonic Technologies for Future Functional Microsystems
作者
S. J. Ben Yoo
出处
期刊：Conference on Lasers and Electro-Optics日期：2016-01-01卷期号：9: SM4G.6-SM4G.6
标识
DOI：10.1364/cleo_si.2016.sm4g.6
摘要
This paper discusses 3D photonic integration technologies and fabrication processes towards realizing advanced functional microsystems. Their applications in computing, networking, sensing, imaging, and biomedicine will also be discussed.
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(2025-6-4)
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