PID控制器
冷冻机
温度控制
控制理论(社会学)
聚光镜(光学)
气体压缩机
控制系统
制冷
冷水机组
半导体器件制造
模糊控制系统
压力控制
工程类
控制工程
模糊逻辑
计算机科学
制冷剂
机械工程
控制(管理)
电气工程
物理
薄脆饼
人工智能
光学
热力学
光源
作者
Meng He,Shouzhen Rui,Mengjie He,Nijing Pi,Xiaokang Cao,Hao Yu,Xin Chang
出处
期刊:2021 IEEE Asia-Pacific Conference on Image Processing, Electronics and Computers (IPEC)
日期:2021-04-14
标识
DOI:10.1109/ipec51340.2021.9421152
摘要
In semiconductor integrated circuit manufacturing, lithography, etching, physical vapor deposition, chemical vapor deposition and other processes, which need to use chiller for precise temperature control of process chamber. The special chiller for semiconductor industry is used to meet the process requirements of large load change and precise temperature control. The special chiller for semiconductor industry is composed of refrigeration system and circulation system. The refrigeration system includes four main parts: compressor, condenser, electronic expansion valve and evaporator, the circulation system is composed of water tank, circulating pump and heater. The system of chiller is a multivariable, nonlinear and time-varying complex system. The temperature control of chiller is affected by compressor frequency, evaporating pressure, suction pressure, heating power and other parameters, it is difficult to establish a mathematical model accurately. The traditional PID control is difficult to meet the control needs. Therefore, fuzzy PID control is adopted. Fuzzy control is applied to improve the system response when the system error is larger, and conventional PID regulator is used when the system error is smaller. The parameters of PID control are changed by using the idea of fuzzy PID, and PID control action is adjusted according to different error situation and control cycle, thereby, reasonable control and regulation of temperature are achieved.
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