飞秒
热导率
氢氟酸
材料科学
激光器
折射率
电导率
辐照
蚀刻(微加工)
激光烧蚀
光学
光电子学
分析化学(期刊)
化学
复合材料
物理化学
核物理学
色谱法
物理
冶金
图层(电子)
作者
Yves Bellouard,Mark Dugan,Ali A. Said,Philippe Bado
摘要
Femtosecond laser irradiation has various noticeable effects on fused silica. Of particular interest, pulses with energy levels below the ablation threshold can locally increase the refractive index and the material etching selectivity to hydrofluoric acid. The mechanism responsible for these effects is not yet fully understood. In this letter, the authors report on local thermal conductivity mapping of laser-affected zones. It is found that these zones exhibit a lower thermal conductivity at room temperature.
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