The effects of substrate-placing manner, deposition temperature and solution concentration on the preparation of ZnO films by chemical bath deposition were investigated in this work. The structures and the morphologies of as-deposited ZnO films were characterized by X-ray diffraction and scanning electron microscope, respectively. The results show that compared with vertically insertion, floating the substrates on the solutions could greatly improve the c-axis orientation of the films. The growth of ZnO films with orientation would also be favored at lower precursor concentrations and temperatures. When the concentration of Zn ( CH 3 COO ) 2 ·2 H 2 O is 0.033 M/L and the deposited temperature is 60°C, ZnO films which are well crystallized and highly c-axis orientated were obtained.