Rare earths show good potential for improving performance on alloy surface. In order to make full use of the rare earth source in China and get enormous benefit, its essential to widen the applications of rare earth on chemical heat treatment. This paper briefly introduced the recent development of chemical heat treatment with rare earth addition, including single and multi- element infiltrated technology, and analyzed the rare earth compound抯 catalytical effects in the chemical heat treatment and their improving effects on alloy performances. Especially, It pointed out the main developing trend of rare earth chemical heat treatment.