Investigation of Spin-On Dielectric Materials for Inkjet Printing Technology Applications

Dielectric materials are used in a wide variety of electronic devices, such as transistors, diodes, capacitors and resistors. Even though there are already many materials available, suppliers are striving to produce novel dielectric materials to support industry needs. In particular, printable dielectric materials need more investigation. In this study, the printability of Siloxane spin-on dielectric materials using the inkjet printing method and related challenges, such as optimization of jetting parameters and printing resolution, have been studied and the results have been reported. Evaporation rate, solid content and viscosity level are discussed and their importance in developing desired components is indicated. Related printing process parameters were carefully examined and challenges related to materials and printing, together with their possible solutions, are described in this paper.