工作职能
电子亲和性(数据页)
退火(玻璃)
铝
电子束物理气相沉积
分析化学(期刊)
材料科学
钻石
蒸发
单层
金属
硅
沉积(地质)
薄膜
电子
化学
纳米技术
冶金
有机化学
热力学
生物
物理
古生物学
量子力学
分子
沉积物
作者
Michael C. James,Mattia Cattelan,Neil A. Fox,R.F. Silva,Ricardo M. Silva,Paul May
标识
DOI:10.1002/pssb.202100027
摘要
Three different procedures are used to deposit aluminium onto O‐terminated (100) and (111) boron‐doped diamond, with the aim of producing a thermally stable surface with low work function and negative electron affinity. The methods are 1) deposition of a > 20 nm film of Al by high‐vacuum evaporation followed by HCl acid wash to remove excess metallic Al, 2) deposition of <3 Å of Al by atomic layer deposition, and 3) thin‐film deposition of Al by electron beam evaporation. The surface structure, work function, and electron affinity are investigated after annealing at temperatures of 300, 600, and 800 °C. Except for loss of excess O upon first heating, the Al + O surfaces remain stable up to 800 °C. The electron affinity values are generally between 0.0 and −1.0 eV, and the work function is generally 4.5 ± 0.5 eV, depending upon the deposition method, coverage, and annealing temperature. The values are in broad agreement with those predicted by computer simulations of Al + O (sub)monolayers on a diamond surface.
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