공중부양 열전대의 설계 및 제작

Thermopile is widely used in a micro heat flux sensor, a thermo-generator, and a micro calorimeter. Conventional MEMS-type thermopiles are realized directly on a silicon wafer, which results in increased heat capacity. This is obviously not good for a highly sensitive thermopile. In this study, an elevated thermopile has been realized with an elevated structure on a silicon substrate to reduce parasitic heat loss. The elevated thermopile arrays are composed of 20 couples, and sensitivity was *** ㎷/K. The sensitivity is a higher value than that of general thermopiles.