光子学
转印
硅光子学
光子集成电路
材料科学
集成电路
足迹
薄脆饼
巨量平行
晶片键合
集成平台
电子线路
计算机科学
纳米技术
晶圆规模集成
光电子学
电子工程
电气工程
工程类
古生物学
复合材料
并行计算
生物
数据库
作者
Günther Roelkens,Jing Zhang,Laurens Bogaert,Maximilien Billet,Dongbo Wang,Biwei Pan,Clemens J. Krückel,Emadreza Soltanian,Dennis Maes,Tom Vanackere,Tom Vandekerckhove,Stijn Cuyvers,Jasper De Witte,Isaac Luntadila Lufungula,Xin Guo,He Li,Senbiao Qin,Grigorij Muliuk,Sarah Uvin,Bahawal Haq
标识
DOI:10.1109/jstqe.2022.3222686
摘要
Silicon photonics (SiPh) is a disruptive technology in the field of integrated photonics and has experienced rapid development over the past two decades. Various high-performance Si and Ge/Si-based components have been developed on this platform that allow for complex photonic integrated circuits (PICs) with small footprint. These PICs have found use in a wide range of applications. Nevertheless, some non-native functions are still desired, despite the versatility of Si, to improve the overall performance of Si PICs and at the same time cut the cost of the eventual Si photonic system-on-chip. Heterogeneous integration is verified as an effective solution to address this issue, e.g. through die-wafer-bonding and flip-chip. In this paper, we discuss another technology, micro-transfer printing, for the integration of non-native material films/opto-electronic components on SiPh-based platforms. This technology allows for efficient use of non-native materials and enables the (co-)integration of a wide range of materials/devices on wafer scale in a massively parallel way. In this paper we review some of the recent developments in the integration of non-native optical functions on Si photonic platforms using micro-transfer printing.
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