Processing and inspection of high-pressure microfluidics systems: A review

In the field of microfluidics, high-pressure microfluidics technology, which utilizes high driving pressure for microfluidic analysis, is an evolving technology. This technology combines microfluidics and pressurization, where the flow of fluid is controlled by means of high-pressure-driven devices greater than 10 MPa. This paper first reviews the existing high-pressure microfluidics systems and describes their components and applications. Then, it summarizes several materials used in the microfabrication of high-pressure microfluidics chips, reviewing their properties, processing methods, and bonding methods. In addition, advanced laser processing techniques for the microfabrication of high-pressure microfluidics chips are described. Last, the paper examines the analytical detection methods employed in high-pressure microfluidics systems, encompassing optical and electrochemical detection methods. The review of analytical detection methods shows the different functions and application scenarios of high-pressure microfluidics systems. In summary, this study provides an efficient and advanced microfluidics system, which can be widely used in chemical engineering, food industry, and environmental engineering under high pressure conditions.