PMMA microsphere based Fabry-Perot fiber optic humidity sensor

法布里-珀罗干涉仪 微球 材料科学 光纤 相对湿度 光纤传感器 水分 湿度 光电子学 纤维 光学 复合材料 物理 波长 工程类 热力学 化学工程
作者
Xiangming He,Huaping Gong,W. W. Li,Ben Xu,Chunliu Zhao
出处
期刊:IEEE Sensors Journal [IEEE Sensors Council]
卷期号:: 1-1
标识
DOI:10.1109/jsen.2025.3525655
摘要

PMMA (polymethyl methacrylate) microsphere based Fabry-Perot (F-P) fibre optic humidity sensor is proposed. A hollow-core fiber (HCF) is spliced with a single-mode fiber (SMF), and PMMA microsphere is inserted into the HCF. Three sensors with different PMMA microsphere sizes (110μm, 120μm, 130μm) were fabricated by using PMMA microsphere as a moisture-sensitive material, and the moisture-sensing characteristics of these sensors with different cavity lengths (45μm, 60μm, 75μm, 90μm) were measured in the range of relative humidity(RH) from 35%RH to 95%RH. The results show that the sensor with PMMA microsphere size of 110μm and cavity length of 45μm has the best sensitivity to humidity of 0.074nm/%RH. Its repeatability, stability, response time, and temperature effect are also investigated. This is the first fiber-optic humidity sensor with a Fabry-Perot structure using PMMA microsphere as filler instead of moisture-sensitive film or gel. Compared to moisture-sensitive film or gel that are prone to aging and hardening leading to a short service life and are prone to deliquescence under high humidity, the sensor proposed in this paper has the advantages of wide measurement range, can be applied to high humidity measurement, fast response time, good long-term stability, and long service life.

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