Ge/Si interfaced label free nanowire BIOFET for biomolecules detection - analytical analysis

This paper comprehensively investigates a dielectric modulated Ge/Si interfaced label free nanowire BIOFET for biomolecules detection. The main highlight of this work is the structural novelty in nanowire BIOFET which is integrated with a germanium source and triple material gate and has been investigated for biosensing application by studying the work function and doping optimization for the enhancement of sensitivity for the very first time. Channel potential, threshold voltage and subthreshold swing have been analytically evaluated and the results have shown an excellent agreement with the simulated results. The biosensor has been comprehensively investigated to study its sensitivity dependence on different device parameters such as cavity shape, cavity dimensions and doping. Work function optimization for sensitivity enhancement has also been studied in detail. Practical limiting factors such as steric hindrance and its effect of on sensitivity has been included in the analysis by considering different fill-in factor and fill-in profile of biomolecules.