Sensitivity enhancement of guided mode resonance sensors under oblique incidence

The sensitivity of guided mode resonance (GMR) sensors is significantly enhanced under oblique incidence. Here in this work, we developed a simplified theoretical model to provide analytical solutions and reveal the mechanism of sensitivity enhancement. We found that the sensitivity under oblique incidence consists of two contributions, the grating sensitivity and waveguide sensitivity, while under normal incidence, only waveguide sensitivity exists. When the two contributions are constructively superposed, as in the case of positive first order diffraction of the grating, the total sensitivity is enhanced. On the other hand, when the two parts are destructively superposed, as in the case of negative first order diffraction, the total sensitivity decreases. The findings are further supported by FDTD numerical calculations and proof-of-concept experiments.