材料科学
波前
光学
3D打印
光子学
光电子学
反向
平版印刷术
无光罩微影
制作
激光器
纳米技术
电子束光刻
物理
抵抗
图层(电子)
病理
替代医学
医学
复合材料
数学
几何学
作者
Wisnu Hadibrata,Heming Wei,Sridhar Krishnaswamy,Koray Aydın
出处
期刊:Nano Letters
[American Chemical Society]
日期:2021-03-15
卷期号:21 (6): 2422-2428
被引量:144
标识
DOI:10.1021/acs.nanolett.0c04463
摘要
An inverse-designed metalens is proposed, designed, and fabricated on an optical fiber tip via a 3D direct laser-writing technique through two-photon polymerization. A computational inverse-design method based on an objective-first algorithm was used to design a thin circular grating-like structure to transform the parallel wavefront into a spherical wavefront at the near-infrared range. With a focal length about 8 μm at an operating wavelength of 980 nm and an optimized focal spot at the scale of 100 nm, our proposed metalens platform is suitable for two-photon direct laser lithography. We demonstrate the use of the fabricated metalens in a direct laser lithography system. The proposed platform, which combines the 3D printing technique and the computational inverse-design method, shows great promise for the fabrication and integration of multiscale and multiple photonic devices with complex functionalities.
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