21am2-A5 Miniaturization of QCR load sensor using microfabrication

Now, high sensitive, wide-measurement range and small size load sensors are desired for health care. High sensitive, wide-measurement range and compact load sensors were achieved using quartz crystal resonator (QCR). However, further miniaturization of the QCR load sensor is desired for extending applications such as wearable sensor. Therefore, in this paper, we fabricated the super compact load sensor using microfabrication and atomic diffusion bonding. The dimension of the fabricated sensor is follows: width is 3 mm, height is 3 mm, depth is 1.08 mm. The volume was reduced from 26 mm^3 to 10 mm^3 and the sensitivity was increased 1.8 times higher than conventional sensor.