Using a combination of Cherenkov phase matching method and nonlinear waveguide crystals, we achieved effective THz wave generation. The THz wave generated from LiNbO3ridge waveguide has over 1000 times stronger than that of conventional photoconductive antenna, broadband spectrum from 0.1 THz to 7 THz and over dynamic range 80 dB. Furthermore, we generated THz wave using other nonlinear optical crystals as DAST and OH1. Although DAST crystal has strong absorption at 1.1 THz, we succeeded to generated broadband THz wave without the strong absorption.