辐照
材料科学
晶体管
空位缺陷
扩散
退火(玻璃)
剂量率
半导体
氧气
动能
氧化物
电离
分子物理学
分析化学(期刊)
光电子学
原子物理学
放射化学
化学
结晶学
离子
热力学
核物理学
电气工程
电压
物理
复合材料
工程类
有机化学
冶金
量子力学
色谱法
作者
Guanghui Zhang,Zeng-hui Yang,Hang Zhou,Yang Liu,Jingxiu Yang,Su‐Huai Wei,Yu Song
标识
DOI:10.1021/acsaelm.3c00947
摘要
We observe an anomalous early recovery behavior of base currents in silicon PNP transistors irradiated by 60Co γ-rays at a dose rate below 1 mrad(Si)/s, which, however, disappears for a higher dose rate. The physical origin of this effect is thoroughly investigated by combining methods of defect concentration measurement, first-principles calculation, and kinetic modeling. The concentrations of interface traps and oxide-trapped charges in these transistors are found to increase monotonically as the total dose increases. Meanwhile, first-principles calculations show that γ-induced concentrated carrier clusters in n-type Si can greatly promote the diffusion of nearby electrically active vacancy-oxygen (VO) defect complexes. Therefore, the observed anomalous behavior of base current is attributed to an irradiation-induced annealing of pre-existing defects in Si at room temperature because moving VO can encounter interstitial oxygen atoms and transform into electrically inactive VO2. A kinetic model is derived for the observable base current by combining this mechanism with the ionization-induced buildup of defects in the SiO2–Si structure. It can uniformly describe the anomalous behavior at low dose rates and the normal behavior at high dose rates by considering the difference in the time of carrier action on the defect diffusion. Our work demonstrates that low-dose-rate γ irradiation is an effective method to realize defect engineering in semiconductors.
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