薄脆饼
材料科学
氮化铌
铌
临界电流
平版印刷术
分析化学(期刊)
纳米技术
光电子学
氮化物
物理
超导电性
化学
凝聚态物理
有机化学
冶金
图层(电子)
作者
Soumen Kar,Harrison Walker,Archit Shah,Hunter Frost,Stephen C. Olson,John Mucci,Jakub Nalaskowski,Brian Martinick,Sandra Schujman,Thomas F. Murray,Corbet S. Johnson,Ilyssa Wells,Ronald Bourque,Stanley Pierce,Ekta Bhatia,Michael C. Hamilton,Satyavolu S. Papa Rao
标识
DOI:10.1109/tasc.2023.3249127
摘要
In this report, the development of reactively sputtered ultra-thin niobium nitride (NbN) films and their fabrication into patterned structures using 193 nm optical lithography on 300 mm scale is presented. The target composition of NbN film with Cu encapsulation showed a critical temperature ( Tc ) of ∼9.5 K (at a thickness of ∼ 50 nm), with < 7% across-wafer variation in room temperature sheet resistance. Using this film composition, damascene structures of 3-20 nm NbN film thickness and 100 - 3000 nm width, encapsulated by copper, were fabricated on 300 mm Si wafer. These were measured to determine the dependence of the critical current ( Ic ) as a function of film thickness. The variation of Tc of copper encapsulated NbN as a function of Nb to N ratio, and position on the wafer is reported, along with the variation of Tc and Ic as a function of linewidth. These results underscore the potential of ultra-thin NbN films deposited over a large area, for a broad range of applications in quantum computing, photon detection and superconducting circuits operating at GHz frequencies.
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