Resistance comparison of 45° incident angle NIR laser anti-reflection film coating with different materials

In view of the application requirements of optical elements with some incident angle in laser-related products, laser damage measurement were carried out on 1064nm anti-reflection films with an incident angle of 45° deposited with the commonly used film materials combination HfO₂-SiO₂ and film materials combination ZrO₂-MgF₂, and the resistance of laser induced damage of the two samples was compared. Two groups of experiments prepared with different film materials were carried out in evaporation coating equipment equipped vacuum pump without oil. Then we designed the film structure, formulated the process plan and got the sample respectively. LIDT of two samples were measured, and the results were analyzed and compared. The results show that the film deposited by the film materials combination ZrO₂-MgF₂ performed well when the process conditions were suitable for the materials. And the resistance of laser induced damage performed similar to the film materials combination HfO₂-SiO₂ under similar process conditions. The research about material ZrO₂-MgF₂ may be strengthened in the future.