The Development of Parallel Confocal Microscope Employing Digital Micromirror Device

A multi-point parallel confocal microscope is designed and developed based on Digital Micromirror Device(DMD).Operated with specific patterns,the DMD can modulate light source into multiple beams.The DMD functions as virtual pinhole array and takes the place of traditional pinholes to realize the lateral scanning technique.According to the research,the DMD based confocal system can achieve parallel scanning in the case of ensuring axial resolution.In that way,it can not only increase the inspecting speed,but also programmablely control the key parameters of the system,such as pinhole size and frequency.The inner surface reflection interference of the beamsplitter prism was eliminated,and a transverse scan strategy was designed.By carrying out experimental measurement on the prototype,depth response curve was acquired and the three-dimensional profile of the target object was successfully restored.