Mitigation of critical current fluctuation of Josephson junctions in superconducting quantum circuits

In superconducting quantum circuits, Josephson junctions are a key component to provide nonlinearity and enable superconducting qubits. Fabricating junctions with precise critical currents is crucial to defining qubit frequency. Here we suppress the critical current variation of Josephson junctions by varying the critical current density Jc and junction areas. The relative standard deviation of the critical current Ic is controlled to be below 0.8%. This uniform fabrication is promising for realizing scalable superconducting quantum computation.