扬声器
微束
声学
微电子机械系统
有限元法
微电子
Timoshenko梁理论
物理
机械
梁(结构)
材料科学
作者
Anton Melnikov,Hermann A. G. Schenk,Franziska Wall,Jorge M. Monsalve,Lutz Ehrig,Michael Stolz,Andreas Mrosk,Sergiu Langa,Bert Kaiser
摘要
Miniaturized micro-electro-mechanical systems (MEMS) loudspeakers is a current developmental trend for in-ear audio applications. However, when a loudspeaker shrinks to a size of a microelectronic chip, the involved physics starts to differ from the macroscopic world. At one side, an electrostatic µSpeakers benefits from small electrode gaps leading to high driving forces. At the same time, the fluid dynamics of the air can cause strong damping forces inside the microscopic cavities of a MEMS loudspeakers chip. Recently we have shown experimentally that the first Euler-Bernoulli bending mode is sufficient to reproduce the behavior of a Coulomb-actuated microbeam over the entire stroke with high accuracy. This leads to an ab initio modeling approach based on a novel Chebyshev-Edgeworth type expansion that leads to an accurate lumped parameter model (LPM) with a single degree of freedom for MEMS loudspeakers. In this work, we discuss the influence of microfluidics on the damping of a balanced nanoscopic electrostatic drive (NED) test loudspeaker design. With the help of the finite element method (FEM) we analyze how the pressure and velocity distribution is linked to the Euler-Bernoulli modes of a simple micro-beam, with the aim of including the squeeze film damping in the LPM. Understanding the various sources of fluid dynamic damping is of great importance for the design of high fidelity MEMS based electrostatic audio transducers (μSpeakers).
科研通智能强力驱动
Strongly Powered by AbleSci AI