Localized surface plasmon-enhanced nanorod micro-LEDs with Ag nanoparticles embedded in insulating and planarizing spin-on glass

To enhance the emission of GaN-based Micro-LEDs (μLEDs), we etched uniform nanorods (NRs) on the μLED surface and filled the nanorod gaps with spin-on glass (SOG) containing mixed Ag nanoparticles (NPs). The nanorod structure creates a conducive environment for close interaction between Ag NPs and quantum wells (QWs), facilitating the coupling of Ag NPs as localized surface plasmons (LSPs) with the QWs to enhance light emission. The SOG acts as an insulating layer between Ag NPs and NRs, preventing electron leakage, while also serving as a planarization material for the nanorod structure. This configuration allows for the fabrication of a planar Indium Tin Oxide layer without short-circuiting the nanorod structure. Compared to traditional planar Micro-LEDs, NR-μLEDs with SOG-encased Ag NPs exhibit a 50% increase in electroluminescence (EL) intensity and a 56% increase in photoluminescence (PL) intensity. This work paves the way for broader applications of LSP in μLEDs.