NUV and DUV high-magnification unified lens objectives: optical design.

The operation of the optical system in the short-wave part of the optical spectrum makes it possible to increase the value of the resolution. This is relevant for microscopy using lens objectives. It is proposed to design the monochromatic microscope optics for use in NUV and DUV spectral ranges. Also an increase in the resolution is possible when using immersion, for example, water. Upon reaching increased values of resolution, it is necessary to increase the scale of the image obtained on the microscope. The unification of structural parameters for the same type of lens objectives operating in a given spectral range becomes an original engineering solution.