Fabrication of an X-ray microcalorimeter with an electrodeposited X-ray microabsorber

For the next generation of astronomical X-ray imaging detectors, arrays with large numbers of microstructures (∼1000 pixels) will be required. To meet this requirement, a tin absorber for an X-ray microcalorimeter, which has a so-called “mushroom” shape, is fabricated by electrodeposition and polishing. This method enables the fabrication of a large number of arrayed microcalorimeters. Details of the fabrication process, the characteristics of the absorber and the fabricated microcalorimeters are reported.