Epitaxy: physical principles and technical implementation

I. Basic Concepts.- 1. Introduction.- 2. Homo- and Heteroepitaxial Crystallization Phenomena.- 3. Application Areas of Epitaxially Grown Layer Structures.- II. Technical Implementation.- 4. Solid Phase Epitaxy.- 5. Liquid Phase Epitaxy.- 6. Vapor Phase Epitaxy.- 7. Molecular Beam Epitaxy.- 8. Metal Organic Vapor Phase Epitaxy.- III. In-situ Analysis of the Growth Processes.- 9. In-situ Analysis of Species and Transport.- 10. In-situ Surface Analysis.- IV. Physics of Epitaxy.- 11. Thermodynamic Aspects.- 12. Atomistic Aspects.- 13. Quantum Mechanical Aspects.- V. Heteroepitaxy.- 14. Heteroepitaxy Growth Phenomena.- 15. Material-Related Problems of Heteroepitaxy.- 16. Closing Remarks.- References.- List of Abbreviations.- List of Metalorganic Precursors.