Guide for Ion-Chromatographic Analysis of Anions in Grab Samples of Ultrapure Water (UPW) in the Semiconductor Industry
作者
D19 Committee
标识
DOI：10.1520/d7980
摘要
Significance and Use 4.1 This guide is intended to help analysts in the semiconductor industry. Examples of the usefulness of anion monitoring include: (1) determining when ion-exchange resin beds (in water-purification systems) need to be regenerated, a
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(2025-6-4)
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