Abstract By the reaction of alkali salts of triorgano‐silanols, ‐silanethiols and trimethylsilylmethanol as well as of triorganosilyllithium compounds with tris(chloromethyl)amine, silyl derivatives of tris(hydroxymethyl)‐, tris(mercaptomethyl)‐ and tris(methyl)amine were prepared.