Programmable deep-UV laser platform for inspection and metrology

This Letter reports on a high-power, narrow-linewidth deep-UV laser platform built upon a frequency-quintupled, Yb-fiber master-oscillator and power-amplifier system. The source, emitting at a pulse repetition rate of 120 MHz with a linewidth of 90 GHz and beam quality of MX/Y2∼2.1/1.5, has been stably maintained over two weeks by successively changing positions and temperatures of nonlinear crystals in parallel, while outputting a 0.5-W average power at 213 nm.