高功率脉冲磁控溅射
纳米晶材料
无定形固体
涂层
结晶
退火(玻璃)
溅射沉积
化学工程
溅射
最大相位
陶瓷
材料科学
结晶学
分析化学(期刊)
冶金
化学
复合材料
纳米技术
薄膜
色谱法
工程类
标识
DOI:10.1016/s0079-6786(00)00006-6
摘要
Ti3AlC2, one of Ti-Al-C MAX phases, has received extensive attention due to its unique nano-laminated structure and combined properties of metals and ceramics. However, ultra-high synthesis temperature exceeding 800 °C is a critical challenge for broad application of Ti3AlC2 coatings on temperature-sensitive substrates. In this study, Ti-Al-C coatings were deposited on Ti-6Al-4V substrates using high-power impulse magnetron sputtering (HiPIMS) and DC sputtering (DCMS) for comparison. Different from as-deposited amorphous Ti-Al-C coating by DCMS, nanocrystalline TiAlx compound was achieved by HiPIMS deposition due to highly ionized plasma flux with high kinetic energy. Furthermore, HiPIMS promoted the generation of dense and smooth Ti3AlC2 phase coating after low-temperature annealing at 700 °C, while annealed DCMS coating only obtained Ti2AlC. In-situ XRD demonstrated such Ti3AlC2 phase could be early involved in crystallization at 450 °C, lowest than synthesis temperature ever reported. The mechanical properties of Ti3AlC2 coating were also discussed in terms of structural evolution.
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