半导体
异质结
工程物理
半导体材料
电介质
材料科学
纳米技术
光电子学
物理
出处
期刊:Journal of vacuum science & technology
[American Vacuum Society]
日期:1993-07-01
卷期号:11 (4): 1331-1335
被引量:14
摘要
A retrospective and chronological review will be presented of the scientific and technological evolution of metal/insulator/semiconductor structures with emphasis on the interfaces between compound semiconductors, homomorphic, heteromorphic, and heterojunction quasi-insulators. The Conference on the Physics and Chemistry of Semiconductor Interfaces has provided for the past 20 years a forum for the synthesis of worldwide research on the nature of dielectric/semiconductor interfaces. The current status of such research and some of the many unresolved fundamental and applications-oriented issues that remain to be explored will be introduced, as well.
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