飞秒
材料科学
脉冲持续时间
光学
激光器
蚀刻(微加工)
扫描电子显微镜
显微镜
脉搏(音乐)
飞秒脉冲整形
各向同性腐蚀
光电子学
分辨率(逻辑)
纳米技术
复合材料
物理
人工智能
探测器
计算机科学
图层(电子)
作者
Cyril Hnatovsky,R. S. Taylor,P. P. Rajeev,E. Simova,V. R. Bhardwaj,D. M. Rayner,P. B. Corkum
摘要
Femtosecond laser radiation tightly focused in bulk fused silica is used to generate self-ordered nanogratings when the sample is translated under the lens at constant speed. The nanogratings are preserved over a length scale of millimeters. We demonstrate that nanogratings are formed for all pulse durations tested, ranging from 40to500fs, and that the pulse energy threshold for this phenomenon increases with decreasing pulse duration. We use high spatial resolution diagnostics based upon selective chemical etching followed by atomic force microscopy and scanning electron microscopy to reveal the morphology of the nanogratings.
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