Cavity optomechanics and cavity optoelectromechanics

Cavity optomechanics offers unparalleled sensitivity allowing the control of mechanical resonators at quantum level. The dynamic cavity backaction can be utilized to cool a mechanical resonator to its ground state or amplify its motion to limit-cycle oscillations. We experiment on extremely scaled optomechanical resonators on an integrated circuit platform. Milestone devices with resonant mass approaching femtogram and sensitivity at attometer per-root-Hz level will be described. Besides offering strong optomechanical interactions, our fully integrated circuit platform also enables efficient coupling of optomechanics to electrical degree of freedom, such as microwave resonators. Prospects on strongly coupled cavity opto-electro-mechanical resonators as well as our progress towards their practical device applications will be discussed.