3-D Simulation of Bosch Process with Voxel-Based Method

A new approach for three-dimensional simulation of Bosch process with arbitrary 2D mask shape with voxel-based method is presented. Its surface evolution is based on 3D mathematical morphology derived from image processing and the visualization is based on volume rendering. The rate distribution of etching and deposition is obtained from macroscopic point advancement models which consider flux distributions and surface reactions. Based on this method, a 3D simulator has been developed, which can be applied in the development of Bosch process. It is possible to simulate the etching of different types of material and alternation of etching and polymerization. By simulating aspect ratio-dependent etching (ARDE), lag and pattern transfer effects can be found clearly in the 3D topography. A simulated 3D profile of 2 mum times 2 mum cross trench shows a good agreement with the experimental data.