Self-Powered 3D Nanosensor Systems for Mechanical Interfacing Applications

The implementation of new materials and device architectures, e.g., 3D integration, is necessary for such purposes. It is also desirable that these future nanosystems can operate in a self-powered manner through sustainably harvesting their operational power from the environment. This chapter discusses the related scientific concepts and technological advances in the area of self-powered 3D nanosystems for mechanical interfacing applications, focusing on the technologies enabled by the fundamental principles of piezotronic effect and triboelectric nanogenerators. The advance of emerging technologies in wearable, human-integrated applications demands the development of energy-efficient, high-performance electronic and sensor systems with diversified functionalities, e.g., capable of interacting with mechanical signals. The rapid advancement in micro-/nanotechnology is gradually shifting the focus from demonstrating discrete devices to developing an integrated system of certain complexity via state-of-art micro-/nanofabrication technologies. Developing multifunctional electronic systems with self-powering capability is expected to enable exciting opportunities in smart skin, human-machine interface, robotics, and many other societally pervasive areas.