<title>Optical properties of ZnSe diffractive optical elements for spot array generation</title>

We have developed a new design of advanced optics for processing high-power laser material. We introduce the concept of DOE (Diffractive Optical Elements) for high power CO₂ lasers ((lambda) =10.6micrometers ). The superior functionality of DOE means that it could become the new standard in optics for next generation devices. Here we describe the design of our DOE technology using scalar theory and micro fabrication using photolithography and RIE (Reactive Ion Etching). We also present results of our ZnSe-DOE technology, mainly focusing on a novel spot-array generator.