Piezoelectric mirror with an active kinematic pair

Accuracy of laser optical beam steering strongly depends on dynamic characteristics of the positioning mechanism of the mirror. Novel design of the beam steering mirror with an integrated piezoelectric active kinematic pair is introduced in the paper. Rotation mechanism of the mirror has a simple design and allows achieving nano-scale resolution. Rotation of the mirror is achieved by exciting harmonic vibrations in the special clamping mechanism. Plate type piezoelectric transducer is used to generate vibrations. Two different electrode patterns and excitation schemes of the actuator are analyzed. Numerical modelling was performed to confirm operating principle of the rotation mechanism. Experimental prototype of the piezoelectric mirror was made and corresponding measurements were performed. Results of numerical and experimental studies are discussed.