Design for Manufacturability of Sub-100 Nanometer Standard Cells

A group of technologies for sub 100nm process modeling and DFM (Design For Manufacturability) problem are presented.A DFM flow for standard cell design is implemented,with typical DFM patterns being discussed in detail.New design rules and solution styles are introduced as well.Based on the DFM flow and design styles,a set of DFM friendly 90nm standard cells are designed.