Analysis and Design of a Novel MOEMS Resonator Gyroscope

A resonator MOEMS gyroscope which uses spatial light paths to sensitive Sagnac effect is presented. And spatial resonator structure composed of micromirrors was designed. The structure of the gyroscope has advantages in microminiaturization. It could be manufactured using MOEMS technics. The influence of parameters of light source and resonator to the fundamental detection limit of the gyroscope was analyzed, which instructed the design of parameters. The fundamental detection limit of the gyroscope can be 1.54 °/h. The style of the resonator was improved using mode matching theory, and the loss of the resonator was decreased. Theorem proving experiment of the resonator was made, and the resonatory curve was observed. In the end, the manufacture technics of the micro-resonator was discussed.