Materials Science of Thin Films

A Review of Materials Science. Vacuum Science and Technology. Physical Vapor Deposition. Chemical Vapor Deposition. Film Formation and Structure. Characterization of Thin Films. Epitaxy. Interdiffusion and Reactions in Thin Films. Mechanical Properties of Thin Films. Electrical and Magnetic Properties of Thin Films. Optical Properties of Thin Films. Metallurgical and Protective Coatings. Modification of Surfaces and Films. Emerging Thin-Film Materials and Applications. Appendixes. Index.