An Investigation for Coating Thickness Uniformity and Technology of Ellipsoidal Mirror

The influence of coating conditions in ellipsoidal mirror coating chamber on coating thickness and coating thickness uniformity of deep ultraviol et exposure system is discussed.The coating thickness uniformity on ellipsoidal mirror is calculated and the method for improving the coating thickness distribu tion is introduced.The ellipsoidal mirrors which its coating thickness uniformit y conforms with the requirements are obtained in experiments.